JPH0260229B2 - - Google Patents

Info

Publication number
JPH0260229B2
JPH0260229B2 JP61014796A JP1479686A JPH0260229B2 JP H0260229 B2 JPH0260229 B2 JP H0260229B2 JP 61014796 A JP61014796 A JP 61014796A JP 1479686 A JP1479686 A JP 1479686A JP H0260229 B2 JPH0260229 B2 JP H0260229B2
Authority
JP
Japan
Prior art keywords
measuring device
probe needle
speed signal
conductor
film carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61014796A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62173733A (ja
Inventor
Takehisa Hayashi
Hironori Tanaka
Toshio Doi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP61014796A priority Critical patent/JPS62173733A/ja
Publication of JPS62173733A publication Critical patent/JPS62173733A/ja
Publication of JPH0260229B2 publication Critical patent/JPH0260229B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP61014796A 1986-01-28 1986-01-28 高速信号測定装置 Granted JPS62173733A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61014796A JPS62173733A (ja) 1986-01-28 1986-01-28 高速信号測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61014796A JPS62173733A (ja) 1986-01-28 1986-01-28 高速信号測定装置

Publications (2)

Publication Number Publication Date
JPS62173733A JPS62173733A (ja) 1987-07-30
JPH0260229B2 true JPH0260229B2 (en]) 1990-12-14

Family

ID=11871015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61014796A Granted JPS62173733A (ja) 1986-01-28 1986-01-28 高速信号測定装置

Country Status (1)

Country Link
JP (1) JPS62173733A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2557685B2 (ja) * 1988-05-17 1996-11-27 東京エレクトロン株式会社 プロ−ブカ−ド
US5189363A (en) * 1990-09-14 1993-02-23 Ibm Corporation Integrated circuit testing system having a cantilevered contact lead probe pattern mounted on a flexible tape for interconnecting an integrated circuit to a tester
KR100196195B1 (ko) * 1991-11-18 1999-06-15 이노우에 쥰이치 프로우브 카드

Also Published As

Publication number Publication date
JPS62173733A (ja) 1987-07-30

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term